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1

Electrical and piezoresistive characterization of boron-doped LPCVD polycrystalline silicon under rapid thermal annealing

M. Le Berre, P. Kleimann, B. Semmache, D. Barbier, P. Pinard

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 201 KB

english, 1996

2

Compositional gradient in and mechanical stability of RF-sputtered and RTA annealed Pb(Zr,Ti)O3 thin films

Emmanuel Defaÿ, Bachir Semmache, Christiane Dubois, Martine LeBerre, Daniel Barbier

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 154 KB

english, 1999

3

Rapid thermal processing of piezoresistive polycrystalline silicon films: An innovative technology for low cost pressure sensor fabrication

B. Semmache, P. Kleimann, M. Le Berre, M. Lemiti, D. Barbier, P. Pinard

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 584 KB

1995

4

-type monocrystalline and polycrystalline silicon

Kleimann, P., Semmache, B., Le Berre, M., Barbier, D.

Journal:

Physical Review B

Year:

1998

Language:

english

File:

PDF, 196 KB

english, 1998

5

About boron and arsenic diffusions in polycrystalline silicon under rapid thermal oxidation

B. Semmache, A. Merabet, C. Gontrand, A. Laugier

Journal:

Materials Science and Engineering: B

Year:

1996

Language:

english

File:

PDF, 307 KB

english, 1996

6

Direct laser printing for high efficiency silicon solar cells fabrication

G. Poulain, C. Boulord, D. Blanc, A. Kaminski, M. Gauthier, C. Dubois, B. Semmache, M. Lemiti

Journal:

Applied Surface Science

Year:

2011

Language:

english

File:

PDF, 444 KB

english, 2011

7

Structural and mechanical characterization of in-situ phosphorus-doped rapid transport low pressure chemical vapor deposition polycrystalline silicon films

S. Kallel, B. Semmache, M. Lemiti, H. Jaffrezic, A. Laugier

Journal:

Microelectronics Journal

Year:

1999

Language:

english

File:

PDF, 130 KB

english, 1999

8

LPE growth of textured single crystal silicon thin film for PV applications

A. Fave, S. Berger, A. Beaumont, B. Semmache, P. Kleimann, J. Linnroos, A. Laugier

Journal:

Thin Solid Films

Year:

2001

Language:

english

File:

PDF, 361 KB

english, 2001

9

Silicon nitride and oxynitride deposition by RT-LPCVD

B. Semmache, M. Lemiti, Ch. Chanelière, Ch. Dubois, A. Sibai, B. Canut, A. Laugier

Journal:

Thin Solid Films

Year:

1997

Language:

english

File:

PDF, 392 KB

english, 1997

10

Thermal drift of piezoresistive properties of LPCVD polysilicon thin films between room temperature and 200 °C

P. Kleimann, B. Semmache, M. Le Berre, D. Barbier

Journal:

Materials Science and Engineering: B

Year:

1997

Language:

english

File:

PDF, 371 KB

english, 1997

11

Optimisation of RF magnetron sputtering and RTA-crystallisation of Pb(Zr0.52Ti0.48)O3 thin films by means of the orthogonal array method

Emmanuel Defay, Martine Leberre, Bachir Semmache, Michel Troccaz, Daniel Barbier

Journal:

Materials Science and Engineering: B

Year:

1998

Language:

english

File:

PDF, 477 KB

english, 1998

12

Comparative study of rapid and classical thermal phosphorus diffusion on polycrystalline silicon thin films

S Bourdais, G Beaucarne, A Slaoui, J Poortmans, B Semmache, C Dubois

Journal:

Solar Energy Materials and Solar Cells

Year:

2001

Language:

english

File:

PDF, 155 KB

english, 2001

13

Rapid thermal oxidation of highly in situ phosphorus doped polysilicon thin films

S Kallel, B Semmache, M Lemiti, A Laugier

Journal:

Materials Science in Semiconductor Processing

Year:

1998

Language:

english

File:

PDF, 172 KB

english, 1998

14

Growth and physical properties of in situ phosphorus-doped RTLPCVD polycrystalline silicon thin films

S Kallel, B Semmache, M Lemiti, Ch Dubois, H Jaffrezic, A Laugier

Journal:

Materials Science in Semiconductor Processing

Year:

1998

Language:

english

File:

PDF, 144 KB

english, 1998

15

Progress in the metallisation of n-type multicrystalline silicon solar cells

J.A. Silva, M. Gauthier, C. Boulord, C. Oliver, A. Kaminski, B. Semmache, M. Lemiti

Journal:

Solar Energy Materials and Solar Cells

Year:

2011

Language:

english

File:

PDF, 1.12 MB

english, 2011

16

SIMS depth profile correction for the study of the first step of the diffusion of boron in silicon

B. Gautier, J.C. Dupuy, B. Semmache, G. Prudon

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

1998

Language:

english

File:

PDF, 428 KB

english, 1998

17

Phosphorous diffusion through silicon nitride thin film for selective emitter application

Laurent Crampette, Gilles Poulain, Yvan Cuminal, Alain Foucaran, Yvon Pellegrin, Bachir Semmache

Journal:

physica status solidi (c)

Year:

2012

Language:

english

File:

PDF, 353 KB

english, 2012

18

Finite Element Simulation Of Laser-Induced Diffusion In Silicon

G. Poulain, D. Blanc, B. Semmache, Y. Pellegrin, M. Lemiti

Journal:

Energy Procedia

Year:

2011

Language:

english

File:

PDF, 997 KB

english, 2011

19

Improving front contacts of n-type solar cells

J.A. Silva, M. Gauthier, C. Boulord, C. Oliver, A. Kaminski, B. Semmache, M. Lemiti

Journal:

Energy Procedia

Year:

2011

Language:

english

File:

PDF, 979 KB

english, 2011

20

Selective Laser Doping From Boron Silicate Glass

G. Poulain, D. Blanc, A. Focsa, J. Gibier, E. Fourmond, B. Bazer-Bachi, B. Semmache, Y. Pellegrin, M. Lemiti

Journal:

Energy Procedia

Year:

2012

Language:

english

File:

PDF, 673 KB

english, 2012

21

Laser Ablation Mechanism Of Silicon Nitride Layers In A Nanosecond UV Regime

G. Poulain, D. Blanc, A. Focsa, M.De Vita, B. Semmache, M. Gauthier, Y. Pellegrin, M. Lemiti

Journal:

Energy Procedia

Year:

2012

Language:

english

File:

PDF, 2.03 MB

english, 2012

22

Dépôt chimique en phase vapeur et à basse pression de couches minces à base de silicium dans un réacteur à lampes halogène

Semmache, B, Kallel, S, Omari, H El, Lemiti, M, Laugier, A

Journal:

Canadian Journal of Physics

Year:

2000

Language:

french

File:

PDF, 95 KB

french, 2000

23

[IEEE 1994 IEEE 1st World Conference on Photovoltaic Energy Conversion - WCPEC (A Joint Conference of PVSC, PVSEC and PSEC) - Waikoloa, HI, USA (5-9 Dec. 1994)] Proceedings of 1994 IEEE 1st World Conference on Photovoltaic Energy Conversion - WCPEC (A Joint Conference of PVSC, PVSEC and PSEC) - Physical properties of RT-LPCVD and LPCVD polysilicon thin films: application to emitter solar cell

Lemiti, M., Semmache, B., Le, Q.N., Barbier, D., Laugier, A.

Year:

1994

Language:

english

File:

PDF, 405 KB

english, 1994

24

Co-diffusion of As and B in and from polysilicon during rapid thermal annealing

Gontrand, C, Merabet, A, Semmache, B, Krieger-Kaddour, S, Bergaud, C, Lemit, M, Barbier, D, Laugier, A

Journal:

Semiconductor Science and Technology

Year:

1993

Language:

english

File:

PDF, 555 KB

english, 1993

25

Modeling of the Boron Emitter Formation Process from BCl3 Diffusion for N-Type Silicon Solar Cells Processing

Armand, Jimmy, Oliver, Cyril, Martinez, F., Semmache, B., Gauthier, M., Foucaran, Alain, Cuminal, Yvan

Journal:

Advanced Materials Research

Year:

2011

Language:

english

File:

PDF, 298 KB

english, 2011

26

Study of Photoluminescence Decay by Time-correlated Single Photon Counting for the Determination of the Minority-carrier Lifetime in Silicon

Parola, Stéphanie, Daanoune, Mehdi, Focsa, Alexandru, Semmache, Bachir, Picard, Erwann, Kaminski-Cachopo, Anne, Lemiti, Mustapha, Blanc-Pélissier, Danièle

Journal:

Energy Procedia

Year:

2014

Language:

english

File:

PDF, 480 KB

english, 2014

27

Laser Process for Selective Emitter Silicon Solar Cells

Poulain, G., Blanc, D., Focsa, A., Bazer-Bachi, B., Gauthier, M., Semmache, B., Pellegrin, Y., Le Quang, N., Lemiti, M.

Journal:

International Journal of Photoenergy

Year:

2012

Language:

english

File:

PDF, 1.14 MB

english, 2012

28

Analysis of Cu traces in Si using Transient Ion Drift combined with Rapid Thermal Annealing.

Heiser, T., Belayachi, A., Pihan, E., Kempf, A., Bourdais, S., Bloechl, P., Huber, A., Semmache, B.

Journal:

MRS Proceedings

Year:

2002

Language:

english

File:

PDF, 61 KB

english, 2002

29

Two dimensional device simulation and performance optimization of n-type silicon solar cell structure using PC2D

Mekemeche, A., Beghdad, M., Belarbi, M., Semmache, B., Cuminal, Y.

Journal:

Year:

2017

Language:

english

File:

PDF, 1.71 MB

english, 2017